Product Details:
Power | 10-100 KW |
Voltage | 220V |
Material | SS |
Grade | 316 |
Product Details:
Power | 10-100 KW |
Voltage | 220V |
No of Phase | Single Phase |
Material | Iron |
Product Details:
Power | 10-100 KW |
Voltage | 220V |
No of Phase | Single Phase |
Type | High Voltage |
Motor | Force: hybrid planar motor, Stator: integral grid platen | |
Support | Air bearing | |
Position sensing | Direct feedback through position sensors in 3 axes (X1/X2/Y) | |
Control | Position | Direct feedback servo control of X, Y and yaw error |
Commutation control | Amplitude/phase control using 2-phase sine wave linear amplifier | |
Max. force | 75 N | |
Max. speed | 0.9 m/s | |
Forcer weight | 1.8 kg | |
Max. Load | 14 kg | |
Air flow rate | 6.4 liter/min | |
Air supply pressure for bearing | 3.0 ± 0.3 bar | |
XY stage accuracy | ±15 µ m | |
Position sensor resolution | X,Y | 1 µ m |
Yaw | 0.8 arc-second | |
Positioning resolution | X.Y | 1 µ m |
Repeatability | X.Y | 3 µ m |
Additional Information:
Product Details:
Power | 10-100 KW |
Voltage | 220V |
Weight | 13.3 |
Material | SS |
Item | Unit | Description | |
Supplied power | Voltage | VAC | 95~125 (LMDX1); 220~240 (LMDX2) |
Frequency | Hz | 50 / 60 | |
Power | VA | 500 (max.) | |
Output Current Amplitude | A | 3 (max.) | |
Interface | Parameter setting: RS 232 | - | 9600 BAUD, 8 data bits, 2 stop bits, odd parity |
Status signal | - | RDY IN Position:(OPTION) Digital I / 0, 8IN / 6 OUT | |
Indexer command | Pulse | STEP/DIR | |
Resolution | µm/pulse | Set by parameter | |
Weight | kg | 13.3 | |
Maximum Operating Temperature | °C | 50 |
Product Details:
Material | SS |
Grade | 314 |
Finished | Polished |
Shape | Rectangle |